Miniature Silicon-on-Insulator Pressure Transducer for Absolute Pressure Measurement at 260°C
Abstract
A miniature, silicon sensor absolute pressure transducer designed for continuous high temperature operation up to 260°C is described. It is intended for engine test cells, wind tunnels and flight testing, as well as for other high temperature applications. It features small size (8.5 gms), excellent dynamic response, high signal output (300mV), and minimal thermal errors over its entire temperature range (-54°C to 260°C). This transducer utilizes a micro-machined silicon diaphragm with silicon-on-insulator (SOI) construction to eliminate sensor electrical leakage problems at high temperature. The small size and excellent dynamic response of this transducer allows high fidelity measurements to be made in difficult-to-access locations. It is also ruggedized to withstand high shock and vibration environments. Performance data, environmental capabilities, and design features of this pressure transducer will be discussed.
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